FIB/SEM
ESCAN GAIA (immersion lens)The TESCAN GAIA is a fully PC controlled scanning electron microscope (SEM) with Schottky field emission cathode in combination with gallium Focused Ion Beam (FIB) column and with Gas Injection System (GIS).The system is designed for today’s research and industry. Its excellent resolution at high beam currents has proved to be advantageous for electron/ion lithography, device prototyping, TEM sample preparation, and analytical applications such as EDX and 3D tomography.
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TESCAN GAIA (immersion lens)
Capabilities
- TEM sample preparation
- Fully automated electron optics set-up and alignment
- Device prototyping using advanced ion milling, etching, and deposition.
- A unique Wide Field OpticsTM design offering a variety of working and displaying modes
- Simultaneous SEM imaging with FIB etching or deposition
- Oxford energy dispersive spectroscopy (EDS) available
- E-Beam lithography available
- Injection Gas: Pt, W, SiO2, H2O, XeF2
- Advanced DrawBeam software module for layout design. AutoCad and GDSII files are acceptable.
- 3D Tomography software option for fully automated procedure of SEM imaging of FIB-prepared cross-sections and subsequent 3D reconstruction and visualization.
- Unique live stereoscopic imaging using advanced 3D Beam Technology opens up the micro and nano-world for an amazing 3D experience and 3D navigation
