E-Beam Evaporator
System Overview
Two e-beam evaporators are available. The evaporator deposits thin metal films by thermally evaporating metals using a highly focused electron beam. The e-beam is produced by a 20 keV power supply. The system is equipped with an Infinicon XTM/2 crystal monitor for accurate deposition thickness.
Photos
Temescal BJD 1800, FC 1800
Capabilities
- Dual gun, three crucibles
- Available sources: Al, Cr, Cu, Au, Ni, Pt, Ti, Mo,Si, Ge, Si3N4, Al2O3
Operation
There is an extra charge for evaporating gold, platinum or other exoctic materials
