Service and pricing

• Fab user fees are based on a hourly rate. An annual entrance fee ($250) is charged for gowning
• If staff time is requested, additional $45/hour will be added to the user fee.

nFab Rates
Yearly Gowning Fee	$250.00 / Year / individual

Services per Hour	University Grant Funded	Corporate Rate
E-Beam Evaporating	$20.00	$40.00
Sputtering	$22.00	$44.00
PECVD	$26.00	$53.00
Deep RIE	$33.00	$66.00
Drytec RIE	$10.00	$20.00
Lam Etch	$10.00	$20.00
XeFl2 Etch	$10.00	$20.00
Wafer Dicing	$82.00	$119.00
Diffusion Furnace Oxide	$21.00	$42.00
Diffusion Furnace Poly Si	$43.00	$86.00
Diffusion Furnace LTO	$43.00	$86.00
Diffussion Furnace Boron Doping	$21.00	$42.00
Diffusion Furnace Phosphorouse Doping	$21.00	$42.00
Diffusion Furnace Anneal	$21.00	$42.00
Wet Bench Processes	$15.00	$30.00
Mask Alignment - EVG 620	$21.00	$42.00
SEM/EDS	$35.00	$105.00
FIB	$51.00	$161.00